Microlithography Fundamentals in Semicon

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"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interac…
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    Om Microlithography Fundamentals in Semicon

    "Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

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    Detaljer

    Format
    E-Bok
    Kopisperre
    Teknisk DRM
    Filformat
    PDF
    Utgivelsesår
    2018
    Forlag
    CRC Press
    Språk
    Engelsk
    ISBN
    9781482273762
    Sider
    336
    Emne
    Circuits & components, Electronics engineering, Plastics & polymers technology, Semi-conductors & super-conductors

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