This book presents a lucid account of the experimental work that has been carried out on diffusion in III-Vs and explores the advanced models that explain the results. It outlines the special properties of the III-V group of semiconductors. Discussion of the basic elements of diffusion in semiconductors provides the theory necessary to understand the subject in depth, and the book gives hints on how to assess the published data. Chapters on diffusion of shallow donors, shallow acceptors, transition elements, and very fast-diffusing elements provide a critical review of published works. The book also presents the neglected subject of self-diffusion, including a section on superlattices.