Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
Av Seongbo Shim, Youngsoo Shin, 2019.Del av serien NanoScience and Technology.
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.
Språk: Engelsk
Ved å fullføre kjøpet aksepterer jeg kjøpsvilkårene.
Ikke tilgjengelig for Klikk&Hent
På nettlager. Bestilles fra England. Leveres normalt innen 5-8 virkedager.
Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
Av Seongbo Shim, Youngsoo Shin, 2019.Del av serien NanoScience and Technology.
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.
Språk: Engelsk
Ved å fullføre kjøpet aksepterer jeg kjøpsvilkårene.
Ikke tilgjengelig for Klikk&Hent
På nettlager. Bestilles fra England. Leveres normalt innen 5-8 virkedager.
Ved å fullføre kjøpet aksepterer du kjøpsvilkårene.
