While ultra-precision machines are now achieving sub-nanometer accuracy, unique challenges continue to arise due to their tight specifications. Addressing the challenges involved in the design process, this text explains how to devise an overall design strategy for precision systems and how to identify errors affecting accuracy. It also defines a suitable metrology for inspection and performance evaluation. Suitable as a reference for professionals looking to stay abreast of this developing field as well as a textbook for engineering students, this work reviews design fundamentals, while offering ready access to essential information, including current international standards.