Pensum -10%
Hopp til hovedinnholdet
Ion Implantation and Annealing Applications, Science and Technology
Redigert av Michael Current, Wilfried Lerch, 2026.Del av serien Topics in Applied Physics.
Contributions from IIT School, Edition 2024
This book compiles the insights and teachings from the 2024 IIT School lectures, offering a comprehensive look at ion implantation and annealing in semiconductor manufacturing. It covers the history of integrated circuits, common applications in CMOS technology, ion sources, radiation damage, annealing of materials like silicon (Si), silicon carbide (SiC) and gallium nitride (GaN), and advances in cluster ion beam technology. This edition, enriched by expert contributions, serves as an essential reference for students and professionals in materials science and microelectronics.
InnbundetEngelsk
2 699,-
Ikke tilgjengelig for Klikk&Hent
Midlertidig tomt på lager
Bestillingsvare. Forventes sendt om ca 14 dager
Oppdag mer
Ion Implantation and Annealing Applications, Science and Technology
Redigert av Michael Current, Wilfried Lerch, 2026.Del av serien Topics in Applied Physics.
Contributions from IIT School, Edition 2024
This book compiles the insights and teachings from the 2024 IIT School lectures, offering a comprehensive look at ion implantation and annealing in semiconductor manufacturing. It covers the history of integrated circuits, common applications in CMOS technology, ion sources, radiation damage, annealing of materials like silicon (Si), silicon carbide (SiC) and gallium nitride (GaN), and advances in cluster ion beam technology. This edition, enriched by expert contributions, serves as an essential reference for students and professionals in materials science and microelectronics.
Oppdag mer
2 699,-
InnbundetEngelsk
Ikke tilgjengelig for Klikk&Hent
Midlertidig tomt på lager
Bestillingsvare. Forventes sendt om ca 14 dager
2 699,-
Ved å fullføre kjøpet aksepterer du kjøpsvilkårene.
